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Piezoresistive sensors are devices that are fabricated by diffusion resistance on a substrate of a semiconductor material in accordance with the piezoresistive effect of the semiconductor material. The substrate can be directly used as a measuring sensing element, and the diffusion resistor is connected in the form of a bridge in the substrate. When the substrate is deformed by an external force, the resistance values ​​will change, and the bridge will produce a corresponding unbalanced output.
The substrate (or diaphragm) used as a piezoresistive sensor is mainly made of silicon wafer and tantalum. The silicon piezoresistive sensor made of sensitive material is getting more and more attention, especially in measuring pressure. And speed solid state piezoresistive sensors are most commonly used.
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