Development and Application of Plasma-based Ion Implantation Technology

Plasma-based ion implantation is a new material surface modification technology that overcomes the defects of traditional ion implantation line-of-sight processing, can handle complex shape workpieces, and can be mass-produced with high production efficiency and low equipment cost. This paper briefly describes the principle, characteristics and industrial application of plasma-based ion implantation, and points out that the combination of plasma-based ion implantation technology and other coating technologies is the future development trend.

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