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Structural Design The structure of the micromechanical silicon spring we designed is shown in a, which consists of a square mass and four identical elastic arms. The mass of the mass is greater than the thickness of each of the resilient arms and can be used as a load bearing platform. The elastic arms are designed to resemble the curved shape of the frog's feet. In the case where the overall size of the spring is constant, the length of each of the elastic arms is greater than the length of each of the elastic arms of the cantilever beam and the right angle type silicon spring. Thus, when the mass is subjected to a constant force perpendicular to its surface, its displacement in the vertical direction will be relatively large. This type of silicon spring is mainly used for moving parts in electromagnetic micro-actuators, enabling other micro devices to move or resonate in the vertical direction.
Schematic diagram of micromechanical silicon spring 3 Elastic constant and natural frequency Since the spring is structurally symmetrical, we can separate one of the elastic arms for static analysis, as shown by b. The deformation of the silicon spring is within the linear elastic range. Therefore, we can use the energy method Cartesian theorem <3> in material mechanics to find the linear displacement generated by the elastic arm under the action of concentrated force.
A concentrated force 4P is applied at the center point of the square mass, which is perpendicular to the surface of the mass, and each elastic arm is subjected to the concentrated force P at the point A connected to the mass (the direction is perpendicular to the paper surface). . In this case, the deformation caused by the axial force and the shear force on the cross section of the elastic arm is small, and can be omitted, considering only the deformation caused by the bending moment and the torque. Therefore, the total deformation potential energy U generated by each elastic arm under the action of the concentrated force P is: U=ni=1lM2i(x)2EIdx+ni=1lT2i(x)2GIpdx(1) where l,Mi(x),Ti (x), E, ​​G, I, and Ip are the length, bending moment, torque, elastic modulus of the material, shear modulus, moment of inertia of the section, and polar moment of inertia of the i-th member, respectively. For non-circular cross-sections, the Ip application in the above equation uses a rather polar moment of inertia instead of It.
Then the entire elastic constant K in the vertical direction (Z direction) can be expressed as: K = 4PD (4) In order to verify the calculation formula of the derived elastic constant, we use the finite element tool ANSYS to simulate the silicon spring, and The simulation results were compared with the elastic constants obtained by the equations (3) and (4). In the comparison calculation (R1 to R4 takes the distance from the center of the arc to the half width of the elastic arm), the concentrated force applied to the middle point A is P=10-5N (the direction is perpendicular to the paper face down). The results were simulated by ANSYS when the elastic arm thickness was 25 m and the width was 300 m. It can be seen that under the action of 10-5N concentrated force, the displacement of the end of each elastic arm in the Z direction is 3.19m, and the elastic constant of the entire silicon spring in the Z direction is calculated as K=410-5/3.1910- 6=12.5392 (N/m). We used these two methods to calculate the elastic constants corresponding to different elastic arm widths and thicknesses. The results are shown in the figure. The average relative error of the elastic constants obtained by the two methods in a is 1.9%, and the average relative error in b is 1.7%. It can be seen that the calculation results obtained by the two methods are quite consistent, which indicates the above derivation. The formula for calculating the elastic constant is reasonable.
In the case where the total length of each elastic arm is constant (the length value is the same as the value in the above comparison calculation), when the intermediate mass is displaced by 100 micrometers, Hooke's law f=Kx (where f is the concentrated force of the system, K is The elastic constant, x is the linear deformation under the action of f) and equations (3) and (4) can find the relationship between f and b and h, and the results are as shown.
It can be seen that when b<600m, h<30m, the mass is 100μm displacement, the required concentration force is f<2mN. Considering the electromagnetic force and the processing technology, we determine that the width and thickness of the elastic arm are 300m and 25m, respectively. The size of the intermediate mass is 6000600060m. The relationship between the concentrated force and the width and thickness of the elastic arm. The relationship between the thickness of the elastic arm and the natural frequency. The natural frequency f of the spring can be expressed as <5>: f=12Km(5) K is the elastic constant of the silicon spring in the Z direction, which is the equivalent mass of the system: m=m1+m2, m1 is the mass of the mass, and m2 is the equivalent mass of the four elastic arms to simplify the mass to the point A. . The silicon spring designed in this paper is difficult to find its equivalent quality, so we used AN-SYS to perform modal analysis on the spring. When the length of the elastic arm is taken as the value in the comparative calculation, the density of silicon is 2330 kg/m3, and b=300 m, the relationship between the natural frequency of the spring and the thickness of the elastic arm is analyzed, as shown.
Manufacturing Process We use dry and wet etching processes to process such silicon springs. First, one side of the double-sided silicon oxide sheet (referred to as side A) is protected with a photoresist (AZ4620), and SiO2 on the other side (referred to as a B side) is removed with hydrofluoric acid and then sputtered on the B side from which SiO2 is removed. A 300 nm thick chrome layer is used to etch a spring pattern. Using this chromium layer as a mask, a spring shape (depth of 25 m) was etched by reactive ion etching (RIE, Model: Nextral 100). Then, a layer of photoresist is deposited on the SiO2 layer on the A side and a window pattern is lithographically patterned. When the B surface is protected by a jig, the window pattern of the A side is etched with KOH solution using SiO2 as a mask until etching is performed. The silicon cavity forms a spring structure. A partial scanning electron micrograph of the silicon spring.
Conclusion A novel micromechanical silicon spring is designed and the calculation formula of the elastic constant is derived. The spring constant and natural frequency of the spring were calculated using the finite element simulation tool ANSYS. The results show that the calculation formula of the elastic constant deduced in this paper is reasonable. The theoretical analysis and actual processing show that the design scheme of this paper is feasible.
Standard:
ANSI B16.5,
EN1092-1 DIN2565 DIN 2566
Size: 1/2''~60''
Class Rating: 150~2500
Facing: RF(raised face);FF(flat face);RTJ(ring type joint);RJ(ring joint face)
TG(tongue and groove face);MFM(male and female face)
Manufacturing process: forge,
Material:
Carbon steel:
ASTM A105;
ASTM A266 GR.1,GR.2,GR.3,GR.4
Stainless steel:
304/SUS304/UNS S30400/1.4301
304L/UNS S30403/1.4306;
304H/UNS S30409/1.4948;
309S/UNS S30908/1.4833
309H/UNS S30909;
310S/UNS S31008/1.4845;
310H/UNS S31009;
316/UNS S31600/1.4401;
316Ti/UNS S31635/1.4571;
316H/UNS S31609/1.4436;
316L/UNS S31603/1.4404;
316LN/UNS S31653;
317/UNS S31700;
317L/UNS S31703/1.4438;
321/UNS S32100/1.4541;
321H/UNS S32109;
347/UNS S34700/1.4550;
347H/UNS S34709/1.4912;
348/UNS S34800;
Alloy steel:
ASTM A694 F42/F46/F48/F50/F52/F56/F60/F65/F70;
ASTM A182 F5a/F5/F9/F11/F12/F22/F91;
ASTM A350 LF1/LF2/LF3;
Duplex steel:
ASTM A182 F51/S31803/1.4462;
ASTM A182 F53/S2507/S32750/1.4401;
ASTM A182 F55/S32760/1.4501/Zeron 100;
2205/F60/S32205;
ASTM A182 F44/S31254/254SMO/1.4547;
17-4PH/S17400/1.4542/SUS630/AISI630;
F904L/NO8904/1.4539;
725LN/310MoLN/S31050/1.4466
253MA/S30815/1.4835
Nickel alloy steel:
Alloy 200/Nickel 200/NO2200/2.4066/ASTM B366 WPN;
Alloy 201/Nickel 201/NO2201/2.4068/ASTM B366 WPNL;
Alloy 400/Monel 400/NO4400/NS111/2.4360/ASTM B366 WPNC;
Alloy K-500/Monel K-500/NO5500/2.475;
Alloy 600/Inconel 600/NO6600/NS333/2.4816;
Alloy 601/Inconel 601/NO6001/2.4851;
Alloy 625/Inconel 625/NO6625/NS336/2.4856;
Alloy 718/Inconel 718/NO7718/GH169/GH4169/2.4668;
Alloy 800/Incoloy 800/NO8800/1.4876;
Alloy 800H/Incoloy 800H/NO8810/1.4958;
Alloy 800HT/Incoloy 800HT/NO8811/1.4959;
Alloy 825/Incoloy 825/NO8825/2.4858/NS142;
Alloy 925/Incoloy 925/NO9925;
Hastelloy C/Alloy C/NO6003/2.4869/NS333;
Alloy C-276/Hastelloy C-276/N10276/2.4819;
Alloy C-4/Hastelloy C-4/NO6455/NS335/2.4610;
Alloy C-22/Hastelloy C-22/NO6022/2.4602;
Alloy C-2000/Hastelloy C-2000/NO6200/2.4675;
Alloy B/Hastelloy B/NS321/N10001;
Alloy B-2/Hastelloy B-2/N10665/NS322/2.4617;
Alloy B-3/Hastelloy B-3/N10675/2.4600;
Alloy X/Hastelloy X/NO6002/2.4665;
Alloy G-30/Hastelloy G-30/NO6030/2.4603;
Alloy X-750/Inconel X-750/NO7750/GH145/2.4669;
Alloy 20/Carpenter 20Cb3/NO8020/NS312/2.4660;
Alloy 31/NO8031/1.4562;
Alloy 901/NO9901/1.4898;
Incoloy 25-6Mo/NO8926/1.4529/Incoloy 926/Alloy 926;
Inconel 783/UNS R30783;
NAS 254NM/NO8367;
Monel 30C
Nimonic 80A/Nickel Alloy 80a/UNS N07080/NA20/2.4631/2.4952
Nimonic 263/NO7263
Nimonic 90/UNS NO7090;
Incoloy 907/GH907;
Nitronic 60/Alloy 218/UNS S21800
Threaded flange is a flange that connects threads to pipes. When it is designed, it can be treated by a loose flange. The advantage is that there is no need for welding, and the additional torque on the cylinder or pipe when the flange is deformed is very small. The disadvantage is that the thickness of the flange is large and the cost is high. It is suitable for the connection of high pressure pipe.
The threaded flange is made from the inner hole of the flange into pipe thread and connected with the pipe with thread, which is a non welded flange. Compared with the flat welding flange or butt welding flange, the threaded flange has the characteristics of convenient installation and maintenance, and can be used on some pipelines which are not allowed to be welded on the spot. Alloy steel flanges are of sufficient strength, but they are not easy to weld or have poor weldability. Threaded flanges can also be selected. However, if the temperature changes rapidly or the temperature is higher than 260 C below -45 C, it is recommended not to use threaded flange to avoid leakage.
Threaded Flange,Din Thread Flange,Astm Threaded Flange,En1092-1 Thread Flange
HeBei GuangHao Pipe Fittings Co .,LTD (Cangzhou Sailing Steel Pipe Co., Ltd) , https://www.guanghaofitting.com